Dynamics of Stiff Floors for Advanced Technology Facilities

Hal Amick and Ahmad Bayat

Vibration control in vibration-sensitive advanced technology facilities generally involves design of a stiff floor for the vibration-sensitive area. The authors have found that the range of floor stiffness required for semiconductor facilities and laboratories falls on a continuum between "soft" and "stiff" floors. A significant variation in properties can be observed along this continuum. This paper will review the dynamic properties of floors, addressing the effects of column-slab interaction on their point stiffness and resonance frequency.

Reprinted from Proceedings of 12th ASCE Engineering Mechanics Conference
La Jolla, California, May 17-20, 1998, pp. 318-321

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