Michael Gendreau and Mei Wu
This
paper summarizes the authors' experience in modeling and controlling environmental
noise from more than 30 semiconductor manufacturing plants ("wafer fabs")
within the past six years. This type of facility typically has a large number
of concentrated noise sources because of the unusually large amount of intake
and circulation air required to maintain cleanroom conditions, the complex
exhaust and pollution control equipment necessary to handle many specialty
gases and chemical products, and high heating and cooling load requirements.
Furthermore, these facilities are most often located in populated areas, making
noise control important, as well as challenging. Modeling and noise control
details for specific types of equipment (make-up air and exhaust fans, cooling
towers, ventilated boiler and chiller rooms, piping, valves, etc.), as well
as other considerations-such as site building layout with respect to sensitive
residential areas-are discussed.
Presented at Inter-Noise 99 -- The 1999 Congress and Exposition on Noise Control Engineering, Fort Lauderdale, FL (December 1999)