Hal Amick, Michael Gendreau, Todd Busch, and Colin Gordon

The paper presents a review of generic vibration criteria used for vibration-sensitive technical facilities. The paper reviews the logic behind and evolution of the Vibration Criterion (VC) curves, originally known as the “BBN” criteria, and discusses the background of a generic criterion in common usage for nanotechnology, currently denoted NIST-A. The criteria are compared with representative types of research equipment and activities.

 

Reprinted from Proceedings of SPIE Conference 5933: Buildings for Nanoscale Research and Beyond, San Diego, CA, July 31 to August 1, 2005