Colin G. Gordon
The
vibration criterion (VC) curves, commonly used in the design of facilities
which house vibration-sensitive instruments and tools, were developed by the
author and his colleagues,
in the early 80's, published by SPIE in 1991 and by IEST in 1993. Each of
the criterion curves
A through E is associated with a "line width" or "detail size" which was an
attempt by the
authors to describe the capabilities of the tools with which each curve might
be associated.
In the years since the curves were developed there have been substantial developments
in
tool design and isolation. In this paper the curves are reviewed in the context
of present-day
tools and processes. Changes are proposed where these might be justified.
Presented at
International Society for Optical Engineering (SPIE) Conference on Current
Developments in Vibration Control for Optomechanical Systems, Denver, CO (July
1999).