Colin G. Gordon
When
designing facilities for research, microelectronics manufacturing and similar
activities, it is generally necessary to have vibration criteria which are
generic (i.e., applicable to classes of equipment and activity) rather than
specific to particular items of equipment. This paper describes the derivation
and use of one such set of criteria that is based on one-third octave band
vibration velocity spectra. The paper also discusses the need to develop methods
and standards for measuring the vibration sensitivity of equipment.
Some examples are given which illustrate the considerable confusion in equipment
sensitivity standards that exists at the present time. A plea is made to equipment
manufacturers and users to develop and call for, respectively, specifications
that are real and precise. This is especially important as the high-technology
community enters the "age of the nanometer."
Reprinted from Proceedings of International Society for Optical Engineering (SPIE), Vol. 1619, San Jose, CA, November 4-6, 1991, pp. ---71-85