Colin G. Gordon and Hal Amick
The site vibration requirements for microelectronics
facilities engaged in the production of integrated circuits are becoming increasingly
more stringent as the line widths involved in the circuitry continue to decrease.
More and more one encounters sites that are marginally acceptable or inadequate
on which the ambient levels are too high. In this paper we shall briefly review
some of the techniques that might be considered to reduce site ambient vibrations.
Such techniques include the use of trenches, deep foundations, piles, and
spring isolation. Some limited field data will be presented.
Reprinted from Proceedings of Inter-Noise 89, Newport Beach, California
(December 1989)