Colin G. Gordon and Mei Q. Wu
Fan-filter units are an increasingly popular alternative to packaged air handlers and fan-tower recirculation air systems. They are used in mini-environments and general cleanrooms, especially in retrofit cleanrooms with limited height. This paper presents noise and vibration data measured on 8 fan-filter units. It also presents measurement methods and performance criteria for fan-filter units.
Presented at the Annual Meeting of the Institute of Environmental Sciences and Technology (IEST), Phoenix, AZ (1998)